Inventor
SASADA KATSUHIRO
JP25 patents
⚠️ This page may combine multiple inventors who share the name “SASADA KATSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
15 patentsUS7187345B2Mar 6, 2007
Image forming method and charged particle beam apparatus
HITACHI HIGH TECH CORP14 citations92
US7817105B2Oct 19, 2010
Image forming method and charged particle beam apparatus
HITACHI HIGH TECH CORP9 citations83
US10184790B2Jan 22, 2019
Pattern measurement method and pattern measurement device
HITACHI HIGH TECH CORP6 citations73
US7745782B2Jun 29, 2010
Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope
HITACHI HIGH TECH CORP7 citations73
US7247864B2Jul 24, 2007
Charged particle beam apparatus
HITACHI HIGH TECH CORP6 citations73
US7030376B2Apr 18, 2006
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP6 citations72
US7626166B2Dec 1, 2009
Electron microscope
HITACHI HIGH TECH CORP2 citations63
US7601974B2Oct 13, 2009
Charged particle beam apparatus
HITACHI HIGH TECH CORP3 citations62
US7205541B1Apr 17, 2007
Charged particle beam apparatus
HITACHI HIGH TECH CORP4 citations62
US7435958B2Oct 14, 2008
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP3 citations61
US8362426B2Jan 29, 2013
Scanning electron microscope and image signal processing method
HITACHI HIGH TECH CORP1 citations52
US7566892B2Jul 28, 2009
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP0 citations50
US7514683B2Apr 7, 2009
Scanning electron microscope
HITACHI HIGH TECH CORP1 citations50
US7205550B2Apr 17, 2007
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP0 citations50
US10393509B2Aug 27, 2019
Pattern height measurement device and charged particle beam device
HITACHI HIGH TECH CORP0 citations40
HITACHI LTD
2 patentsMATSUSHITA ELECTRIC WORKS LTD
2 patentsUS5692061ANov 25, 1997
Method of utilizing a two-dimensional image for detecting the position, posture, and shape of a three-dimensional objective
MATSUSHITA ELECTRIC WORKS LTD50 citations94
US5867592AFeb 2, 1999
Method of utilizing edge images of a circular surface for detecting the position, posture, and shape of a three-dimensional objective having the circular surface part
MATSUSHITA ELECTRIC WORKS LTD41 citations91