Inventor
SEYA EIICHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “SEYA EIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS6664552B2Dec 16, 2003
Method and apparatus for specimen fabrication
HITACHI LTD139 citations99
US6794663B2Sep 21, 2004
Method and apparatus for specimen fabrication
HITACHI LTD33 citations96
US5562800AOct 8, 1996
Wafer transport method
HITACHI LTD69 citations96
US5420436AMay 30, 1995
Methods for measuring optical system, and method and apparatus for exposure using said measuring method
HITACHI LTD61 citations94
US7897936B2Mar 1, 2011
Method and apparatus for specimen fabrication
HITACHI LTD15 citations92
US7268356B2Sep 11, 2007
Method and apparatus for specimen fabrication
HITACHI LTD28 citations92
US5601686AFeb 11, 1997
Wafer transport method
HITACHI LTD26 citations92
US5235591AAug 10, 1993
Stack type optical disc apparatus, sealed and separate type optical head therefor and optical disc medium
HITACHI LTD27 citations92
HITACHI HIGH TECH CORP
3 patentsUS7791043B2Sep 7, 2010
Stage mechanism, electron microscope having the stage mechanism and method of controlling positioning of stage mechanism
HITACHI HIGH TECH CORP11 citations79
US6943945B2Sep 13, 2005
Two axis state for microscope
HITACHI HIGH TECH CORP3 citations62
US7514683B2Apr 7, 2009
Scanning electron microscope
HITACHI HIGH TECH CORP1 citations50