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Inventor
LORY EARL R
US
4 patents
⚠️ This page may combine multiple inventors who share the name “LORY EARL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AT & T TECHNOLOGIES INC
2 patents
US4491499A
Jan 1, 1985
Optical emission end point detector
AT & T TECHNOLOGIES INC
81 citations
94
US4675089A
Jun 23, 1987
Low temperature deposition method for high quality aluminum oxide films
AT & T TECHNOLOGIES INC
38 citations
90
AT & T BELL LAB
1 patent
US5013691A
May 7, 1991
Anisotropic deposition of silicon dioxide
AT & T BELL LAB
822 citations
97
AT & T CORP
1 patent
US5467883A
Nov 21, 1995
Active neural network control of wafer attributes in a plasma etch process
AT & T CORP
106 citations
94