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Inventor
TAKITA HIROSHI
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “TAKITA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU MICROELECTRONICS LTD
2 patents
US7587703B2
Sep 8, 2009
Layout determination method, method of manufacturing semiconductor devices, and computer readable program
FUJITSU MICROELECTRONICS LTD
3 citations
60
US7569842B2
Aug 4, 2009
Method for correcting electron beam exposure data
FUJITSU MICROELECTRONICS LTD
5 citations
56
FUJITSU LTD
1 patent
US6821685B2
Nov 23, 2004
Block mask making method, block mask and exposure apparatus
FUJITSU LTD
3 citations
59
MIYAJIMA MASAAKI
1 patent
US8141009B2
Mar 20, 2012
Preparing data for hybrid exposure using both electron beam exposure and reticle exposure in lithographic process
MIYAJIMA MASAAKI
0 citations
42