Inventor

PARKHE VIJAY D

US122 patents

⚠️ This page may combine multiple inventors who share the name “PARKHE VIJAY D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PARKHE VIJAY D

APPLIED MATERIALS INC

Full area temperature controlled electrostatic chuck and method of fabricating same

Wafer heater assembly

Chemical vapor deposition of barriers from novel precursors

Pixelated capacitance controlled ESC

Substrate support with radio frequency (RF) return path

Detachable electrostatic chuck having sealing assembly

Bonding structure of E chuck to aluminum base configuration

Real time monitoring with closed loop chucking force control

Substrate support assembly with deposited surface features

Electrostatic chuck assembly for high temperature processes

Electrostatic puck assembly with metal bonded backing plate for high temperature processes

Cleaning of a substrate support

Substrate support with electrically floating power supply

Controlled resistivity boron nitride electrostatic chuck apparatus for retaining a semiconductor wafer and method of fabricating the same

Method and apparatus for predicting failure of an eletrostatic chuck

Substrate carrier

Coating for reducing contamination of substrates during processing

Electrostatic chuck with variable pixelated magnetic field

Substrate support assembly for high temperature processes

Rotatable heated electrostatic chuck

Substrate support assembly having metal bonded protective layer

Electrostatic chuck refurbishment

Substrate support assembly with deposited surface features

Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck

Electrostatic chuck having thermally isolated zones with minimal crosstalk

Electrostatic chuck with temperature control

Cooling pedestal with coating of diamond-like carbon

Pixelated capacitance controlled ESC

Electrostatic chuck assembly for cryogenic applications

Tunable temperature controlled substrate support assembly

Electrostatic chuck assembly for cryogenic applications

Electrostatic chuck assembly for cryogenic applications

Electrostatic puck assembly with metal bonded backing plate

Ground electrode formed in an electrostatic chuck for a plasma processing chamber

High power electrostatic chuck design with radio frequency coupling

Substrate support assembly for high temperature processes

Electrostatic chuck with differentiated ceramics

Electrostatic chuck optimized for refurbishment

Temperature controlled substrate support assembly

Workpiece carrier for high power with enhanced edge sealing

Gas distribution plate assembly for high power plasma etch processes

PARKHE VIJAY D

Electrostatic chuck with variable pixilated heating

Heat exchange pedestal with coating of diamond-like material

APPLIED MAT

Pixelated capacitance controlled ESC

SUN ACTIVE GLASS ELECTROCHROM

Electrochromic devices and methods

SANSONI STEVEN V

Electrostatic chuck assembly

ROY SHAMBHU N

Electrostatic chuck and methods of use thereof

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Detachable high-temperature electrostatic chuck assembly

HIRAHARA ROBERT T

Electrostatic chuck electrical balancing circuit repair

BUSCHE MATTHEW J

Electrostatic chuck with external flow adjustments for improved temperature distribution