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Inventor
INDA YOSHIAKI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “INDA YOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEN CORP
1 patent
US8692216B2
Apr 8, 2014
Ion implantation apparatus and control method thereof
SEN CORP
11 citations
80
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD
1 patent
US10790117B2
Sep 29, 2020
Ion implantation apparatus and measurement device
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD
0 citations
30