Inventor

TEBJE LARS

DE23 patents

⚠️ This page may combine multiple inventors who share the name “TEBJE LARS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEBJE LARS

BOSCH GMBH ROBERT

Acceleration sensor

Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component

Micromechanical component for a pressure and inertial sensor device

Micromechanical inertial sensor

Micromechanical component and method for manufacturing a micromechanical component

Micromechanical system including a suspension and an electrode positioned movably

Micromechanical system, method for operating a micromechanical system

Micromechanical sensor device and corresponding production method

Micromechanical structure, in particular sensor arrangement, and corresponding operating method

Micromechanical structure and micromechanical sensor

Method for manufacturing a MEMS element

Method for operating a micromechanical inertial sensor

Micromechanical sensor

Micromechanical acceleration sensor

CLASSEN JOHANNES

Micromechanical z-sensor

Triaxial acceleration sensor

Triaxial acceleration sensor

Micromechanical component and method for operating a micromechanical component

Acceleration sensor and method for its manufacture

STAHL HEIKO

Micromechanical acceleration sensor having an open seismic mass

FRANKE AXEL

Hybrid intergrated component and method for the manufacture thereof

ULLRICH GUENTHER-NINO-CARLO

Inertial sensor with overlapping torsional springs

KAELBERER ARND

Acceleration sensor having an electrode bridge