Inventor
BOSCH NIELS JOHANNES MARIA
NL8 patents
⚠️ This page may combine multiple inventors who share the name “BOSCH NIELS JOHANNES MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS11315752B2Apr 26, 2022
E-beam apparatus
ASML NETHERLANDS BV2 citations70
US10867770B2Dec 15, 2020
E-beam apparatus
ASML NETHERLANDS BV2 citations70
US10649347B2May 12, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations57
US9494869B2Nov 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US11621142B2Apr 4, 2023
Substrate positioning device and electron beam inspection tool
ASML NETHERLANDS BV0 citations48
US11302512B2Apr 12, 2022
Electron beam inspection apparatus stage positioning
ASML NETHERLANDS BV0 citations47
US12249481B2Mar 11, 2025
Stage anti-fretting mechanism for roller bearing lifetime improvement
ASML NETHERLANDS BV0 citations44