Inventor
SCHEBEN ROLF
DE33 patents
⚠️ This page may combine multiple inventors who share the name “SCHEBEN ROLF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
26 patentsUS9651375B2May 16, 2017
Yaw-rate sensor with a compensating mass
BOSCH GMBH ROBERT7 citations84
US9936298B2Apr 3, 2018
MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection
BOSCH GMBH ROBERT9 citations83
US9571938B2Feb 14, 2017
Microphone element and device for detecting acoustic and ultrasound signals
BOSCH GMBH ROBERT4 citations73
US10260879B2Apr 16, 2019
Sensor device and method for operating a sensor device having at least one seismic mass
BOSCH GMBH ROBERT2 citations72
US9914636B2Mar 13, 2018
MEMS component including a sound-pressure-sensitive diaphragm element
BOSCH GMBH ROBERT6 citations72
US9516423B2Dec 6, 2016
Membrane arrangement for a microelectromechanical measuring transducer and method for producing a membrane arrangement
BOSCH GMBH ROBERT5 citations68
US9369809B2Jun 14, 2016
MEMS component for generating pressure pulses
BOSCH GMBH ROBERT2 citations62
US11719539B2Aug 8, 2023
Micromechanical component for a yaw rate sensor and corresponding production method
BOSCH GMBH ROBERT1 citations59
US11874291B2Jan 16, 2024
Method for temperature compensation of a microelectromechanical sensor, and microelectromechanical sensor
BOSCH GMBH ROBERT1 citations57
US11485630B2Nov 1, 2022
Micromechanical sensor
BOSCH GMBH ROBERT1 citations57
US12528694B2Jan 20, 2026
Microelectromechanical system and method for manufacturing a microelectromechanical system
BOSCH GMBH ROBERT0 citations52
US9998828B2Jun 12, 2018
MEMS microphone element
BOSCH GMBH ROBERT1 citations52
US10035696B2Jul 31, 2018
MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure
BOSCH GMBH ROBERT0 citations51
US9725300B2Aug 8, 2017
Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes
BOSCH GMBH ROBERT1 citations51
US9112108B2Aug 18, 2015
Energy source and method for supplying an autonomous electrical load system and the use of same
BOSCH GMBH ROBERT0 citations51
US12241743B2Mar 4, 2025
Sensor system and method for securing a sensor system
BOSCH GMBH ROBERT0 citations50
US10753742B2Aug 25, 2020
Micromechanical yaw rate sensor and method for operating same
BOSCH GMBH ROBERT0 citations50
US10753743B2Aug 25, 2020
Micromechanical yaw rate sensor and method for the production thereof
BOSCH GMBH ROBERT0 citations50
US9621996B2Apr 11, 2017
Micromechanical sound transducer system and a corresponding manufacturing method
BOSCH GMBH ROBERT0 citations50
US11860184B2Jan 2, 2024
Micromechanical structure and micromechanical sensor
BOSCH GMBH ROBERT0 citations49
US11697583B2Jul 11, 2023
Micromechanical device including a stop spring structure
BOSCH GMBH ROBERT0 citations49
US11988511B2May 21, 2024
Micromechanical component for a rotation rate sensor and corresponding manufacturing method
BOSCH GMBH ROBERT0 citations48
US9516424B2Dec 6, 2016
Micromechanical sensor system combination and a corresponding manufacturing method
BOSCH GMBH ROBERT0 citations42
US9945669B2Apr 17, 2018
Rotation rate sensor and a method for operating a rotation rate sensor
BOSCH GMBH ROBERT0 citations40
US9823073B2Nov 21, 2017
Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate
BOSCH GMBH ROBERT0 citations40
US10794928B2Oct 6, 2020
Microelectromechanical component
BOSCH GMBH ROBERT0 citations36