Inventor

TASHINO FUMITERU

JP3 patents

Patents

3 patents

US7563155B2Jul 21, 2009

Cutting apparatus with ultrasonic transducer

DISCO CORP11 citations76

US9517962B2Dec 13, 2016

Plate-shaped object processing method

DISCO CORP3 citations70

US12496674B2Dec 16, 2025

Gettering layer forming device and processing apparatus

DISCO CORP0 citations48