Inventor
SCHIETINGER CHARLES W
US11 patents
⚠️ This page may combine multiple inventors who share the name “SCHIETINGER CHARLES W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUXTRON CORP
10 patentsUS5154512AOct 13, 1992
Non-contact techniques for measuring temperature or radiation-heated objects
LUXTRON CORP119 citations97
US5769540AJun 23, 1998
Non-contact optical techniques for measuring surface conditions
LUXTRON CORP84 citations96
US5490728AFeb 13, 1996
Non-contact optical techniques for measuring surface conditions
LUXTRON CORP96 citations96
US5310260AMay 10, 1994
Non-contact optical techniques for measuring surface conditions
LUXTRON CORP57 citations96
US5166080ANov 24, 1992
Techniques for measuring the thickness of a film formed on a substrate
LUXTRON CORP90 citations96
US5318362AJun 7, 1994
Non-contact techniques for measuring temperature of radiation-heated objects
LUXTRON CORP42 citations92
US7042581B2May 9, 2006
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
LUXTRON CORP34 citations91
US6654132B1Nov 25, 2003
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
LUXTRON CORP35 citations91
US6570662B1May 27, 2003
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
LUXTRON CORP15 citations83
US6934040B1Aug 23, 2005
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
LUXTRON CORP10 citations72