Inventor
PUSCH CATHARINA
DE3 patents
Patents
3 patentsUS6664167B2Dec 16, 2003
Memory with trench capacitor and selection transistor and method for fabricating it
INFINEON TECHNOLOGIES AG9 citations72
US6326262B1Dec 4, 2001
Method for fabricating epitaxy layer
INFINEON TECHNOLOGIES AG8 citations72
US6605487B2Aug 12, 2003
Method for the manufacture of micro-mechanical components
INFINEON TECHNOLOGIES AG10 citations67