Inventor
DAIRIKI KOUJI
JP2 patents
Patents
2 patentsUS7449372B2Nov 11, 2008
Manufacturing method of substrate having conductive layer and manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB24 citations92
US7670884B2Mar 2, 2010
Manufacturing method of substrate having conductive layer and manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB11 citations83