Inventor
NARASIMHA KARTHIK THIMMAVAJJULA
US8 patents
Patents
8 patentsUS10418243B2Sep 17, 2019
Ultra-high modulus and etch selectivity boron-carbon hardmask films
APPLIED MATERIALS INC6 citations83
US11728168B2Aug 15, 2023
Ultra-high modulus and etch selectivity boron-carbon hardmask films
APPLIED MATERIALS INC2 citations72
US11031262B2Jun 8, 2021
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC2 citations71
US10636684B2Apr 28, 2020
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US10403515B2Sep 3, 2019
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US12211694B2Jan 28, 2025
Ultra-high modulus and etch selectivity boron-carbon hardmask films
APPLIED MATERIALS INC0 citations62
US10971364B2Apr 6, 2021
Ultra-high modulus and etch selectivity boron carbon hardmask films
APPLIED MATERIALS INC0 citations62
US10599043B2Mar 24, 2020
Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components
APPLIED MATERIALS INC0 citations50