Inventor
SAGAWA HIDETOSHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SAGAWA HIDETOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
5 patentsUS10920764B2Feb 16, 2021
Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method
SCREEN HOLDINGS CO LTD3 citations69
US11404629B2Aug 2, 2022
Treating solution supply apparatus
SCREEN HOLDINGS CO LTD0 citations48
US11000783B2May 11, 2021
Pumping apparatus, treatment solution supplying device, and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations48
US10144033B2Dec 4, 2018
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations45
US10423070B2Sep 24, 2019
Substrate treating method
SCREEN HOLDINGS CO LTD0 citations36