Inventor
PAYNE JUSTIN
US10 patents
⚠️ This page may combine multiple inventors who share the name “PAYNE JUSTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
YANG XIAO
4 patentsUS8530258B2Sep 10, 2013
Method and apparatus for MEMS oscillator
YANG XIAO3 citations62
US8314984B2Nov 20, 2012
Method and system for optical MEMS with flexible landing structures
YANG XIAO4 citations62
US8105736B2Jan 31, 2012
Method and system for overlay correction during photolithography
YANG XIAO2 citations62
US8119432B2Feb 21, 2012
Method and apparatus for MEMS oscillator
YANG XIAO0 citations51