Inventor
EHRENBERG TILLMANN
DE4 patents
Patents
4 patentsUS7906978B2Mar 15, 2011
Device for measuring or inspecting substrates of the semiconductor industry
VISTEC SEMICONDUCTOR SYS GMBH2 citations54
US7817262B2Oct 19, 2010
Device for measuring positions of structures on a substrate
VISTEC SEMICONDUCTOR SYS GMBH2 citations48
US7948635B2May 24, 2011
Method for determining positions of structures on a substrate
VISTEC SEMICONDUCTOR SYS GMBH0 citations42
US7872763B2Jan 18, 2011
Device for measuring the position of at least one structure on a substrate
VISTEC SEMICONDUCTOR SYS GMBH0 citations42