Inventor
BYERS JEFFREY
US5 patents
⚠️ This page may combine multiple inventors who share the name “BYERS JEFFREY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
3 patentsUS6968253B2Nov 22, 2005
Computer-implemented method and carrier medium configured to generate a set of process parameters for a lithography process
KLA TENCOR TECH CORP57 citations95
US7528953B2May 5, 2009
Target acquisition and overlay metrology based on two diffracted orders imaging
KLA TENCOR TECH CORP10 citations83
US7142941B2Nov 28, 2006
Computer-implemented method and carrier medium configured to generate a set of process parameters and/or a list of potential causes of deviations for a lithography process
KLA TENCOR TECH CORP13 citations83