Inventor
CHOI GEUN MIN
KR5 patents
Patents
5 patentsUS6893914B2May 17, 2005
Method for manufacturing semiconductor device
HYNIX SEMICONDUCTOR INC65 citations93
US7112506B2Sep 26, 2006
Method for forming capacitor of semiconductor device
HYNIX SEMICONDUCTOR INC15 citations81
US7588996B2Sep 15, 2009
Oxide pattern forming method and patterning method of semiconductor device
HYNIX SEMICONDUCTOR INC3 citations59
US7282421B2Oct 16, 2007
Methods for reducing a thickness variation of a nitride layer formed in a shallow trench isolation CMP process and for forming a device isolation film of a semiconductor device
HYNIX SEMICONDUCTOR INC4 citations58
US6696338B2Feb 24, 2004
Method for forming ruthenium storage node of semiconductor device
HYNIX SEMICONDUCTOR INC6 citations58