Inventor

O'NEILL ROBERT GRIFFITH

US5 patents

⚠️ This page may combine multiple inventors who share the name “O'NEILL ROBERT GRIFFITH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

4 patents

US10658222B2May 19, 2020

Moveable edge coupling ring for edge process control during semiconductor wafer processing

LAM RES CORP7 citations82

US9873940B2Jan 23, 2018

Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus

LAM RES CORP16 citations81

US12027410B2Jul 2, 2024

Edge ring arrangement with moveable edge rings

LAM RES CORP0 citations61

US9435692B2Sep 6, 2016

Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output

LAM RES CORP2 citations60

O'NEILL ROBERT GRIFFITH

1 patent

US8060330B2Nov 15, 2011

Method and system for centering wafer on chuck

O'NEILL ROBERT GRIFFITH12 citations78