Inventor
TAKASUGI YASUNORI
JP7 patents
Patents
7 patentsUS10620421B2Apr 14, 2020
Image-forming device, and dimension measurement device
HITACHI HIGH TECH CORP1 citations71
US10976536B2Apr 13, 2021
Image-forming device, and dimension measurement device
HITACHI HIGH TECH CORP0 citations61
US10417756B2Sep 17, 2019
Pattern measurement apparatus and defect inspection apparatus
HITACHI HIGH TECH CORP1 citations61
US10197783B2Feb 5, 2019
Image-forming device, and dimension measurement device
HITACHI HIGH TECH CORP1 citations61
US10984980B2Apr 20, 2021
Charged particle beam device for imaging vias inside trenches
HITACHI HIGH TECH CORP1 citations60
US11791130B2Oct 17, 2023
Electron beam observation device, electron beam observation system, and image correcting method and method for calculating correction factor for image correction in electron beam observation device
HITACHI HIGH TECH CORP0 citations50
US10665420B2May 26, 2020
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations38