Inventor

HENNIGAN DANIEL R

US6 patents

⚠️ This page may combine multiple inventors who share the name “HENNIGAN DANIEL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLE INC

4 patents

US11187914B2Nov 30, 2021

KLA TENCOR CORP

2 patents

US9574992B1Feb 21, 2017

Single wavelength ellipsometry with improved spot size capability

KLA TENCOR CORP5 citations68

US9662688B2May 30, 2017

Apparatus and method for cross-flow purge for optical components in a chamber

KLA TENCOR CORP1 citations46

HENNIGAN DANIEL R

APPLE INC

Mirror-based scene cameras

Camera system

Camera system

Substrate to place components for camera size reduction

KLA TENCOR CORP

Single wavelength ellipsometry with improved spot size capability

Apparatus and method for cross-flow purge for optical components in a chamber