Inventor
MA DIAN
CN2 patents
Patents
2 patentsUS12419136B2Sep 16, 2025
Ultrathin silicon oxynitride interface material, tunnel oxide passivated structure and preparation methods and applications thereof
TERANERGY TECH CO LTD0 citations51
US12414403B2Sep 9, 2025
Modified tunnel oxide layer and preparation method, TOPCon structure and preparation method, and solar cell
TERANERGY TECH CO LTD0 citations49