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Inventor
FOCHT MARLIN W
US
2 patents
Patents
2 patents
US4599791A
Jul 15, 1986
Method of making integrated circuits employing proton-bombarded AlGaAs layers
AT & T BELL LAB
3 citations
59
US4597165A
Jul 1, 1986
Method of making integrated circuits employing ion-bombarded InP layers
AT & T BELL LAB
5 citations
59