Inventor

MUELLER-RISSMANN WERNER

DE4 patents

⚠️ This page may combine multiple inventors who share the name “MUELLER-RISSMANN WERNER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS STIFTUNG

3 patents

US6521877B1Feb 18, 2003

Optical arrangement having improved temperature distribution within an optical element

ZEISS STIFTUNG37 citations92

US6522392B1Feb 18, 2003

Optical systems and methods of compensating rotationally non-symmetrical image defects in an optical system

ZEISS STIFTUNG34 citations92

US6466382B2Oct 15, 2002

Optical arrangement

ZEISS STIFTUNG26 citations92

CLAUSS WILFRIED

1 patent

US8570488B2Oct 29, 2013

Transmitting optical element and objective for a microlithographic projection exposure apparatus

CLAUSS WILFRIED0 citations48