Inventor

LUNG CHIEN-HUA

TW2 patents

Patents

2 patents

US7811892B2Oct 12, 2010

Multi-step annealing process

UNITED MICROELECTRONICS CORP2 citations60

US7265065B2Sep 4, 2007

Method for fabricating dielectric layer doped with nitrogen

UNITED MICROELECTRONICS CORP5 citations59