Inventor

TEZCAN DENIZ SABUNCUOGLU

BE3 patents

⚠️ This page may combine multiple inventors who share the name “TEZCAN DENIZ SABUNCUOGLU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEZCAN DENIZ SABUNCUOGLU

2 patents

US8647920B2Feb 11, 2014

Method for forming 3D-interconnect structures with airgaps

TEZCAN DENIZ SABUNCUOGLU12 citations78

US8809188B2Aug 19, 2014

Method for fabricating through substrate vias

TEZCAN DENIZ SABUNCUOGLU4 citations68

IMEC

1 patent

US9646930B2May 9, 2017

Semiconductor device having through-substrate vias

IMEC12 citations81