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Inventor
FAN YANG-KAI
TW
3 patents
⚠️ This page may combine multiple inventors who share the name “FAN YANG-KAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
2 patents
US7405165B2
Jul 29, 2008
Dual-tank etch method for oxide thickness control
TAIWAN SEMICONDUCTOR MFG
5 citations
48
US8871032B2
Oct 28, 2014
Wet processing apparatuses
TAIWAN SEMICONDUCTOR MFG
0 citations
46
TANG KUANG-NIAN
1 patent
US8460478B2
Jun 11, 2013
Wet processing apparatuses
TANG KUANG-NIAN
2 citations
51