Inventor
ICHIKAWA HIRONOBU
JP9 patents
⚠️ This page may combine multiple inventors who share the name “ICHIKAWA HIRONOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS9793134B2Oct 17, 2017
Etching method
TOKYO ELECTRON LTD2 citations71
US9613824B2Apr 4, 2017
Etching method
TOKYO ELECTRON LTD3 citations69
US9087676B2Jul 21, 2015
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations62
US9881806B2Jan 30, 2018
Method of manufacturing a semiconductor device
TOKYO ELECTRON LTD0 citations51
US9318340B2Apr 19, 2016
Method of manufacturing a semiconductor device
TOKYO ELECTRON LTD0 citations51
US9147580B2Sep 29, 2015
Plasma etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations50