Inventor
SHIH PANG-MIN
TW3 patents
Patents
3 patentsUS10100410B2Oct 16, 2018
Film thickness monitoring system and method using the same
IND TECH RES INST0 citations49
US10691114B2Jun 23, 2020
Method and apparatus for dynamic intelligent scheduling
IND TECH RES INST1 citations47
US10051712B2Aug 14, 2018
Driving module and light source system having the driving module
IND TECH RES INST0 citations36