Inventor

EMORI SOUDAI

JP3 patents

Patents

3 patents

US12315700B2May 27, 2025

Plasma processing apparatus and ceiling wall

TOKYO ELECTRON LTD0 citations58

US11574808B2Feb 7, 2023

Plasma processing method and plasma processing apparatus

TOKYO ELECTRON LTD0 citations56

US12567563B2Mar 3, 2026

Plasma processing apparatus and plasma processing method

TOKYO ELECTRON LTD0 citations48