P

Inventor

SATO JUNICHI

JP259 patents
⚠️ This page may combine multiple inventors who share the name “SATO JUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SONY CORP

19 patents
US5286296AFeb 15, 1994

Multi-chamber wafer process equipment having plural, physically communicating transfer means

SONY CORP375 citations99
US6746942B2Jun 8, 2004

Semiconductor thin film and method of fabricating semiconductor thin film, apparatus for fabricating single crystal semiconductor thin film, and method of fabricating single crystal thin film, single crystal thin film substrate, and semiconductor device

SONY CORP59 citations96
US6482743B1Nov 19, 2002

Method of forming a semiconductor device using CMP to polish a metal film

SONY CORP54 citations96
US5688364ANov 18, 1997

Chemical-mechanical polishing method and apparatus using ultrasound applied to the carrier and platen

SONY CORP60 citations96
US5514603AMay 7, 1996

Manufacturing method for diamond semiconductor device

SONY CORP88 citations96
US5326404AJul 5, 1994

Plasma processing apparatus

SONY CORP72 citations96
US5246525ASep 21, 1993

Apparatus for polishing

SONY CORP86 citations96
US5182221AJan 26, 1993

Method of filling a recess flat with a material by a bias ECR-CVD process

SONY CORP88 citations96
US5998303ADec 7, 1999

Semiconductor device making method

SONY CORP21 citations93
US5907787AMay 25, 1999

Process for fabricating multilayer connection

SONY CORP28 citations93
US5763018AJun 9, 1998

Method for forming dielectric layer

SONY CORP23 citations93
US5685950ANov 11, 1997

Dry etching method

SONY CORP21 citations93
US5573981ANov 12, 1996

Method of removing residual charges of an electrostatic chuck used in a layer deposition process

SONY CORP33 citations93
US5374591ADec 20, 1994

Method of making a metal plug

SONY CORP36 citations93
US5284799AFeb 8, 1994

Method of making a metal plug

SONY CORP42 citations93
US7144793B2Dec 5, 2006

Method of producing crystalline semiconductor material and method of fabricating semiconductor device

SONY CORP37 citations92
US5502008AMar 26, 1996

Method for forming metal plug and/or wiring metal layer

SONY CORP30 citations92
US5260232ANov 9, 1993

Refractory metal plug forming method

SONY CORP30 citations92
US5254171AOct 19, 1993

Bias ECR plasma CVD apparatus comprising susceptor, clamp, and chamber wall heating and cooling means

SONY CORP52 citations92

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

7 patents

MICRON TECHNOLOGY INC

4 patents

PANASONIC CORP

3 patents

SHINSEI INDUSTRIES CO

3 patents

ALPS ELECTRIC CO LTD

1 patent

JAPAN AVIATION ELECTRON

1 patent

TOYODA GOSEI KK

1 patent

TOSHIBA KK

1 patent

TDK CORP

1 patent

CANON KK

1 patent

NIPPON MINING CO

1 patent

HONDA MOTOR CO LTD

1 patent

MATUSHITA ELECTRIC IND CO LTD

1 patent

DENSO CORP

1 patent

JIDOSHA DENKI KOGYO KK

1 patent

DAIDO KOGYO KK

1 patent

TOSHIBA MEMORY CORP

1 patent

FANUC CORP

1 patent

Showing the top 50 of 259 patents by PatentIndex Score.