Inventor
MIZUSAWA KENETSU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MIZUSAWA KENETSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MIZUSAWA KENETSU
4 patentsUS8236380B2Aug 7, 2012
Gas supply system, substrate processing apparatus and gas supply method
MIZUSAWA KENETSU9 citations80
US8906193B2Dec 9, 2014
Gas supply unit, substrate processing apparatus and supply gas setting method
MIZUSAWA KENETSU5 citations70
US8701593B2Apr 22, 2014
Gas supply system, substrate processing apparatus and gas supply method
MIZUSAWA KENETSU5 citations69
US8221638B2Jul 17, 2012
Gas supply system, substrate processing apparatus and gas supply method
MIZUSAWA KENETSU4 citations59
TOKYO ELECTRON LTD
3 patentsUS9441791B2Sep 13, 2016
Gas supply unit, substrate processing apparatus and supply gas setting method
TOKYO ELECTRON LTD21 citations90
US8561572B2Oct 22, 2013
Gas supply system, substrate processing apparatus and gas supply method
TOKYO ELECTRON LTD2 citations60
US8375893B2Feb 19, 2013
Gas supply system, substrate processing apparatus and gas supply method
TOKYO ELECTRON LTD2 citations60