Inventor
TAKENAKA HIROTO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TAKENAKA HIROTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS6544380B2Apr 8, 2003
Plasma treatment method and apparatus
TOKYO ELECTRON LTD104 citations98
US6106737AAug 22, 2000
Plasma treatment method utilizing an amplitude-modulated high frequency power
TOKYO ELECTRON LTD66 citations96
US6991701B2Jan 31, 2006
Plasma treatment method and apparatus
TOKYO ELECTRON LTD21 citations91