Inventor
NEFZI MARWÈNE
DE6 patents
Patents
6 patentsUS11415895B2Aug 16, 2022
Compensation of creep effects in an imaging device
ZEISS CARL SMT GMBH4 citations70
US10809636B2Oct 20, 2020
Optical arrangement, in particular lithography system
ZEISS CARL SMT GMBH2 citations67
US10416570B2Sep 17, 2019
Optical imaging arrangement with a piezoelectric device
ZEISS CARL SMT GMBH3 citations67
US10761436B2Sep 1, 2020
Optical arrangement, in particular lithography system, with a transport lock
ZEISS CARL SMT GMBH0 citations48
US11703770B2Jul 18, 2023
Compensation of creep effects in an imaging device
ZEISS CARL SMT GMBH0 citations44
US11526089B2Dec 13, 2022
Compensation of creep effects in an imaging device
ZEISS CARL SMT GMBH0 citations44