Inventor
WALSH JAMES HAMILTON
US4 patents
Patents
4 patentsUS12405227B2Sep 2, 2025
Method for region of interest processing for reticle particle detection
ASML HOLDING NV0 citations56
US11480885B2Oct 25, 2022
Apparatus for and method cleaning a support inside a lithography apparatus
ASML HOLDING NV0 citations51
US12379655B2Aug 5, 2025
Contaminant identification metrology system, lithographic apparatus, and methods thereof
ASML HOLDING NV0 citations43
US10429748B2Oct 1, 2019
Apparatus including a gas gauge and method of operating the same
ASML HOLDING NV0 citations42