Inventor

SUBRAMANIAN KRUPAKAR M

US19 patents

⚠️ This page may combine multiple inventors who share the name “SUBRAMANIAN KRUPAKAR M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUBRAMANIAN KRUPAKAR M

MICRON TECHNOLOGY INC

Protective coating for planarization

Nanoimprint lithography template techniques for use during the fabrication of a semiconductor device and systems including same

Voltage-controlled semiconductor inductor and method

Line edge roughness reduction

Device for controlling placement of nanoparticles

Method for forming and planarizing adjacent regions of an integrated circuit

Methods of forming trench isolation in silicon of a semiconductor substrate by plasma

Device for positioning nanoparticles

Methods of etching trenches into silicon of a semiconductor substrate

Voltage-controlled semiconductor inductor and method

Method and apparatus to sort nanotubes

Method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrate

Methods of patterning substrates

Method of etching a substrate; method of forming a feature on a substrate; and method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrate

SUBRAMANIAN KRUPAKAR M

Methods of etching trenches into silicon of a semiconductor substrate, methods of forming trench isolation in silicon of a semiconductor substrate, and methods of forming a plurality of diodes

Methods for forming nanodots and/or a patterned material during the formation of a semiconductor device

Voltage-controlled semiconductor inductor and method

Methods of etching trenches into silicon of a semiconductor substrate, methods of forming trench isolation in silicon of a semiconductor substrate, and methods of forming a plurality of diodes

ABATCHEV MIRZAFER

Methods for integrated circuit fabrication with protective coating for planarization