Inventor

KLOS MARTIN A

US3 patents

Patents

3 patents

US5262643ANov 16, 1993

Automatic tip approach method and apparatus for scanning probe microscope

IBM60 citations94

US5360974ANov 1, 1994

Dual quad flexure scanner

IBM27 citations90

US5260577ANov 9, 1993

Sample carriage for scanning probe microscope

IBM11 citations72