Inventor · disambiguated record
Fang-Lin Lu
Also filed as: LU FANG-LIN
3 granted patents·60 citations·filing 1999–2005
72Inventor score
Top patents by PatentIndex Score
3 records- 0190US7052374B1Multipurpose slurry delivery arm for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted May 30, 2006·28 cites·20 claims
- 0261US6272902B1Method and apparatus for off-line testing a polishing headTAIWAN SEMICONDUCTOR MANUFACTO·Filed 1999·Granted Aug 14, 2001·25 cites·20 claims
- 0330US6068544AApparatus and method for calibrating a polishing headTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted May 30, 2000·7 cites·20 claims
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