Inventor

SHEN YU-SHENG

TW3 patents

Patents

3 patents

US6221199B1Apr 24, 2001

Apparatus and method for removing an adhesive bonded pad

TAIWAN SEMICONDUCTOR MFG12 citations70

US6068544AMay 30, 2000

Apparatus and method for calibrating a polishing head

TAIWAN SEMICONDUCTOR MFG7 citations65

US6561877B1May 13, 2003

Apparatus and method for retaining moisture on a polishing pad

TAIWAN SEMICONDUCTOR MFG0 citations31