P

Inventor

TANAKA MORIMITSU

JP4 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA MORIMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NEC CORP

3 patents
US6231425B1May 15, 2001

Polishing apparatus and method

NEC CORP19 citations89
US6116993ASep 12, 2000

Chemicomechanical polishing device for a semiconductor wafer

NEC CORP29 citations89
US6093080AJul 25, 2000

Polishing apparatus and method

NEC CORP44 citations89

NEC ELECTRONICS CORP

1 patent
US7064079B2Jun 20, 2006

Method of removing polymer and apparatus for doing the same

NEC ELECTRONICS CORP4 citations59