Inventor
PARK JEONG-HYUCK
KR3 patents
Patents
3 patentsUS6464794B1Oct 15, 2002
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates
SAMSUNG ELECTRONICS CO LTD75 citations94
US6176969B1Jan 23, 2001
Baffle plate of dry etching apparatus for manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD92 citations93
US6797109B2Sep 28, 2004
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates
SAMSUNG ELECTRONICS CO LTD7 citations71