P

Inventor

SETO JACKIE

US4 patents
⚠️ This page may combine multiple inventors who share the name “SETO JACKIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents
US8010483B2Aug 30, 2011

Component-tracking system and methods therefor

LAM RES CORP10 citations78
US7899627B2Mar 1, 2011

Automatic dynamic baseline creation and adjustment

LAM RES CORP3 citations60
US7814046B2Oct 12, 2010

Dynamic component-tracking system and methods therefor

LAM RES CORP4 citations57

PANDHUMSOPORN TAMARAK

1 patent
US8262920B2Sep 11, 2012

Minimization of mask undercut on deep silicon etch

PANDHUMSOPORN TAMARAK1 citations42