Inventor
SANTOS ED
US2 patents
Patents
2 patentsUS8797705B2Aug 5, 2014
Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential
VALCORE JR JOHN C3 citations60
US8440061B2May 14, 2013
System and method for plasma arc detection, isolation and prevention
VALCORE JR JOHN C2 citations57