Inventor
GEERPURAM DWARAKANATH
US4 patents
Patents
4 patentsUS8691702B2Apr 8, 2014
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC13 citations83
US9082839B2Jul 14, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC3 citations58
US9202721B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations51
US9202737B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations48