Inventor

HOWALD ARTHUR M

US52 patents

⚠️ This page may combine multiple inventors who share the name “HOWALD ARTHUR M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HOWALD ARTHUR M

LAM RES CORP

Minimizing arcing in a plasma processing chamber

Apparatus and methods for minimizing arcing in a plasma processing chamber

Electrostatic dechucking method and apparatus for dielectric workpieces in vacuum processors

Apparatus and methods for improving the stability of RF power delivery to a plasma load

Method of determining the correct average bias compensation voltage during a plasma process

Plasma processor apparatus and method, and antenna

Methods for controlling an RF matching network

Plasma processing method and apparatus with control of rf bias

Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator

Segmenting a model within a plasma system

Systems and methods for providing characteristics of an impedance matching model for use with matching networks

Plasma excitation coil

System and method for dechucking a workpiece from an electrostatic chuck

Apparatus and methods for improving the stability of RF power delivery to a plasma load

Dechucking method and apparatus for workpieces in vacuum processors

Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator

High sputter, etch resistant window for plasma processing chambers

Plasma excitation coil

Systems and methods for tuning an impedance matching network in a step-wise fashion

Segmenting a model within a plasma system

Systems and methods for tuning an impedance matching network in a step-wise fashion

Systems and methods for tuning an impedance matching network in a step-wise fashion

Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator

Systems and methods for using one or more fixtures and efficiency to determine parameters of a match network model

Systems and methods for using multiple inductive and capacitive fixtures for applying a variety of plasma conditions to determine a match network model

Antenna for plasma processor apparatus

Interferometric method for endpointing plasma etch processes

Method and apparatus for producing uniform processing rates

Systems and methods for tuning a MHz RF generator within a cycle of operation of a kHz RF generator

Systems and methods for tuning a MHz RF generator within a cycle of operation of a kHZ RF generator

Systems and methods for reducing power reflected towards a higher frequency RF generator during a period of a lower RF generator and for using a relationship to reduce reflected power

Segmenting a model within a plasma system

Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator

Systems and methods for using computer-generated models to reduce reflected power towards an RF generator during state transitions of the RF generator by controlling RF values of the RF generator

Cable power loss determination for virtual metrology

System, method and apparatus for self-cleaning dry etch

Feedback control system for iterative etch process

Method of determining the correct average bias compensation voltage during a plasma process

Thermal methods for cleaning post-CMP wafers

Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator

Cable power loss determination for virtual metrology

DORDI YEZDI

Processes and systems for engineering a copper surface for selective metal deposition

Processes and systems for engineering a barrier surface for copper deposition

Processes and systems for engineering a silicon-type surface for selective metal deposition to form a metal silicide

HOWALD ARTHUR M

Antenna for plasma processor and apparatus

Antenna for plasma processor and apparatus

SHAKESPEARE CO

Line guide for fishing rod

BOYD JOHN

Controlled ambient system for interface engineering

DORDI YEZDI N

Methods of low-K dielectric and metal process integration

BAILEY III ANDREW D

System, method and apparatus for self-cleaning dry etch