Inventor
WOLTERS CHRISTIAN
US29 patents
⚠️ This page may combine multiple inventors who share the name “WOLTERS CHRISTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
15 patentsUS9891177B2Feb 13, 2018
TDI sensor in a darkfield system
KLA TENCOR CORP56 citations96
US7773212B1Aug 10, 2010
Contemporaneous surface and edge inspection
KLA TENCOR CORP24 citations92
US7548308B2Jun 16, 2009
Illumination energy management in surface inspection
KLA TENCOR CORP8 citations83
US9841512B2Dec 12, 2017
System and method for reducing radiation-induced false counts in an inspection system
KLA TENCOR CORP2 citations70
US10324045B2Jun 18, 2019
Surface defect inspection with large particle monitoring and laser power control
KLA TENCOR CORP4 citations68
US9255891B2Feb 9, 2016
Inspection beam shaping for improved detection sensitivity
KLA TENCOR CORP2 citations62
US9116132B2Aug 25, 2015
Surface scanning inspection system with independently adjustable scan pitch
KLA TENCOR CORP2 citations62
US9194812B2Nov 24, 2015
Illumination energy management in surface inspection
KLA TENCOR CORP0 citations51
US8786850B2Jul 22, 2014
Illumination energy management in surface inspection
KLA TENCOR CORP0 citations51
US9182358B2Nov 10, 2015
Multi-spot defect inspection system
KLA TENCOR CORP1 citations50
US10241217B2Mar 26, 2019
System and method for reducing radiation-induced false counts in an inspection system
KLA TENCOR CORP0 citations49
US8934091B2Jan 13, 2015
Monitoring incident beam position in a wafer inspection system
KLA TENCOR CORP0 citations48
US7605915B2Oct 20, 2009
System and method to create haze standard
KLA TENCOR CORP1 citations44
US10088345B1Oct 2, 2018
Haze and defect distribution and aperture configuration in surface metrology inspectors
KLA TENCOR CORP0 citations43
US9678350B2Jun 13, 2017
Laser with integrated multi line or scanning beam capability
KLA TENCOR CORP0 citations40
KLA TENCOR TECH CORP
6 patentsUS7304310B1Dec 4, 2007
Methods and systems for inspecting a specimen using light scattered in different wavelength ranges
KLA TENCOR TECH CORP89 citations97
US7027146B1Apr 11, 2006
Methods for forming a calibration standard and calibration standards for inspection systems
KLA TENCOR TECH CORP33 citations89
US7787114B2Aug 31, 2010
Systems and methods for inspecting a specimen with light at varying power levels
KLA TENCOR TECH CORP17 citations82
US7697129B2Apr 13, 2010
Systems and methods for inspecting a wafer with increased sensitivity
KLA TENCOR TECH CORP6 citations73
US7372559B2May 13, 2008
Systems and methods for inspecting a wafer with increased sensitivity
KLA TENCOR TECH CORP6 citations73
US7511816B2Mar 31, 2009
Methods and systems for determining drift in a position of a light beam with respect to a chuck
KLA TENCOR TECH CORP4 citations56
WOLTERS CHRISTIAN
3 patentsUS10215712B2Feb 26, 2019
Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system
WOLTERS CHRISTIAN3 citations71
US8134698B1Mar 13, 2012
Dynamic range extension in surface inspection systems
WOLTERS CHRISTIAN6 citations71
US8885158B2Nov 11, 2014
Surface scanning inspection system with adjustable scan pitch
WOLTERS CHRISTIAN3 citations60