P

Inventor

PETRENKO ALEKSEY

US7 patents
⚠️ This page may combine multiple inventors who share the name “PETRENKO ALEKSEY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

5 patents
US9194812B2Nov 24, 2015

Illumination energy management in surface inspection

KLA TENCOR CORP0 citations51
US8786850B2Jul 22, 2014

Illumination energy management in surface inspection

KLA TENCOR CORP0 citations51
US8042254B1Oct 25, 2011

Method for improving edge handling chuck aerodynamics

KLA TENCOR CORP1 citations50
US8934091B2Jan 13, 2015

Monitoring incident beam position in a wafer inspection system

KLA TENCOR CORP0 citations48
US7605915B2Oct 20, 2009

System and method to create haze standard

KLA TENCOR CORP1 citations44

KLA TENCOR TECH CORP

1 patent
US7436505B2Oct 14, 2008

Computer-implemented methods and systems for determining a configuration for a light scattering inspection system

KLA TENCOR TECH CORP12 citations80

PETRENKO ALEKSEY

1 patent
US9068952B2Jun 30, 2015

Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system

PETRENKO ALEKSEY4 citations65