Inventor
HALLER KURT L
US10 patents
⚠️ This page may combine multiple inventors who share the name “HALLER KURT L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS5298720AMar 29, 1994
Method and apparatus for contamination control in processing apparatus containing voltage driven electrode
IBM53 citations95
US5367139ANov 22, 1994
Methods and apparatus for contamination control in plasma processing
IBM60 citations94
US5387777AFeb 7, 1995
Methods and apparatus for contamination control in plasma processing
IBM42 citations91
US5255089AOct 19, 1993
Portable particle detector assembly
IBM54 citations91
KLA TENCOR TECH CORP
3 patentsUS7436505B2Oct 14, 2008
Computer-implemented methods and systems for determining a configuration for a light scattering inspection system
KLA TENCOR TECH CORP12 citations80
US7697129B2Apr 13, 2010
Systems and methods for inspecting a wafer with increased sensitivity
KLA TENCOR TECH CORP6 citations73
US7372559B2May 13, 2008
Systems and methods for inspecting a wafer with increased sensitivity
KLA TENCOR TECH CORP6 citations73
KLA TENCOR CORP
3 patentsUS10551320B2Feb 4, 2020
Activation of wafer particle defects for spectroscopic composition analysis
KLA TENCOR CORP5 citations71
US9194812B2Nov 24, 2015
Illumination energy management in surface inspection
KLA TENCOR CORP0 citations51
US8786850B2Jul 22, 2014
Illumination energy management in surface inspection
KLA TENCOR CORP0 citations51