Inventor
REICH JUERGEN
US13 patents
⚠️ This page may combine multiple inventors who share the name “REICH JUERGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS9664909B1May 30, 2017
Monolithic optical beam splitter with focusing lens
KLA TENCOR CORP8 citations77
US9255891B2Feb 9, 2016
Inspection beam shaping for improved detection sensitivity
KLA TENCOR CORP2 citations62
US9116132B2Aug 25, 2015
Surface scanning inspection system with independently adjustable scan pitch
KLA TENCOR CORP2 citations62
US9194812B2Nov 24, 2015
Illumination energy management in surface inspection
KLA TENCOR CORP0 citations51
US8786850B2Jul 22, 2014
Illumination energy management in surface inspection
KLA TENCOR CORP0 citations51
US9182358B2Nov 10, 2015
Multi-spot defect inspection system
KLA TENCOR CORP1 citations50
US8934091B2Jan 13, 2015
Monitoring incident beam position in a wafer inspection system
KLA TENCOR CORP0 citations48
KLA TENCOR TECH CORP
2 patentsUS7528944B2May 5, 2009
Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool
KLA TENCOR TECH CORP28 citations91
US7511816B2Mar 31, 2009
Methods and systems for determining drift in a position of a light beam with respect to a chuck
KLA TENCOR TECH CORP4 citations56